High Purity and High Performance cleaning solutions

CA-HP series 

Semiconductors
  • Highly purified aqueous citric acid soln.
  • Suitable for the manufacture of the Si wafer, washing regeneration step.
Product name Features Application example
CA-HP 10 High Purity aqueous solution of 10 % citric acid Various raw materials of cleaning solns.
Cleaning soln. for removing metal impurities (wafer fabrication process, the reclaim process)
CA-HP 30 High Purity aqueous solution of 30 % citric acid

Packaging

  • a cardboard case of 10Lx2 bottles

Related laws and regulations

TSCA Listed
EINECS Listed

CIREX series 

Semiconductors
  • A cleaning soln. which ionizes impurities metals adsorbed on the wafer surface with its organic acid and prevents re-adsorption by stabilizing with a chelating soln.
製品名 特徴 適用例
CIREX High Purity and High Performance citric acid
Aqueous soln
Superior in the removal of  metal impurities
Electronic industrial cleaning soln.
Post Al-CMP cleaning soln.
Post W-CMP cleaning soln.

Packaging

  • Negotiable

Related laws and regulations

TSCA -
EINECS -

CLEAN series  

SemiconductorsLED
  • capable of removing particles and impurities metal ions generated in the Cu-CMP process at the same time
  • having extremely low etching rate for the various materials on the wafer surface
  • The liquid chemical composition is excellent for worker safety and environmental compliance.
Product name Features Application example
CLEAN-100 High Purity and High Performance citric acid aqueous soln.
One-step cleaning soln. for metal impurities and particles.
Post CMP cleaning soln.
Post Cu-CMP cleaning soln.
Post Cu/low-k cleaning soln.

CLEAN-8000 series

High Performance cleaning soln.
Superior in corrosion inhibitionand and defect removal of Cu wiring.

Packaging

  • CLEAN-100 :
    ・200L drum
    ・10L x 2 bottles
  • CREAN-8000 series: Negotiable

Related laws and regulations

TSCA -
EINECS -

WCP series 

Semiconductors
  • Neutral cleaning soln. 
  • Possible to remove fine particles without causing surface dirt due to corrosion of the W surface, .
Product name Features Application example
WCP series High Performance and High Purity natural amine aqueous soln. Post W-CMP cleaning soln.

Packaging

  • Negotiable

Related laws and regulations

TSCA -
EINECS -

Application

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