Photo acid generators (WPAG series)

Characteristics

Diazodisulfones Triphenylsulfonium salts

Our photo acid generator product line has proven quality and performance on excimer resist for LSI on industry leading resist manufactures. Besides the products listed below, Wako is developing diazodisulfones and triphenylsulfonium salts. Also, we sell diphenyliodonium compound which is used as an optical cationic initiator as WPI series. Wako can supply products of varied grades from high grade to multipurpose grade. We also provides series of custom synthesis of PAGs.

Application

WPAG-145 (Bis(cyclohexylsulfonyl)diazomethane))

image

CAS.No: 138529-81-4

Molecular weight: 334.45

Physicality

Color
Appearance
white - light yellow
crystals or crystalline powder
Melting point 130.1~130.6℃
Solubilities water, ethanol, hexane : practically insoluble.
acetone, ethyl acetate : freely soluble .

Packaging


Related laws and regulations

TSCA -
EINECS -

For photoresist for manufacturing semiconductor device, etc.

WPAG-170 (Bis(tert-butylsulfonyl)diazomethane))

image

CAS.No: 138529-84-7

Molecular weight: 282.38

Physicality

Color
Appearance
slightly yellow - yellow
crystalline powder
Melting point 121℃
Solubilities water, methanol : practically insoluble.
chloroform, acetone, acetonitrile : freely soluble.

Packaging


Related laws and regulations

TSCA -
EINECS -

For photoresist for manufacturing semiconductor device, etc.

WPAG-199 (Bis (4-methylphenylsulfonyl) diazomehtane)

image

CAS.No: 14159-45-6

Molecular weight: 350.41

Physicality

Color
Appearance
light yellow - yellow
crystals or crystalline powder
Melting point 121.4~122.4℃
Solubilities water, ethanol, hexane : practically insoluble.
acetone, ethyl acetate : slightly freely soluble.

Packaging


Related laws and regulations

TSCA -
EINECS -

For photoresist for manufacturing semiconductor device, etc.

WPAG-336 (Diphenyl-4-methylphenylsulfonium trifluoromethanesulfonate)

image

CAS.No: 81416-37-7

Molecular weight: 426.47

Physicality

Color
Appearance
white
crystals
Melting point 102℃
Solubilities water : insoluble.
acetone, PGMEA (1-methoxy-2-propyl acetate) : soluble.


Packaging


Related laws and regulations

TSCA -
EINECS -

For photoresist for manufacturing semiconductor device, etc.

WPAG-367 (Diphenyl-2,4,6-trimethylphenylsulfonium p-toluenesulfonate)

image

CAS.No: 347841-51-4

Molecular weight: 476.66

Physicality

Color
Appearance
white
crystals or crystalline powder
Melting point 112~113℃
Solubilities water, methanol, acetone, methylene chloride : soluble.



Packaging


Related laws and regulations

TSCA -
EINECS -

For photoresist for manufacturing semiconductor device, etc.

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