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Specialty Chemicals Home
> Photo acid generators
We can offer WPAGs for KrF or ArF- excimer resist.
Wako is developing various diazodisulfones and triphenylsulfonium
salts as follows.
Diphenyliodonium salts is a useful WPI
series as photo cationic initiators. Wako provides supply
products of varied grades from high grade to multipurpose grade.
We aiso provide servises of custom manufacturing of PAGs.
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- yellow crystal
- mp. 130°C
- UV absorption~300nm
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- yellow crystal
- mp. 121°C
- UV absorption~270nm
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- white-pale yellow crystal
- mp. 120°C
- UV absorption~320nm
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- white crystal
- mp. 132°C
- UV absorption~300nm
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- white crystal
- mp. 101°C
- UV absorption~310nm
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- white crystal
- mp. 112°C
- UV absorption~310nm
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here for further information of interested reagents.
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Photo acid generators
High Purity and High Performance Organic Acid Solution for Wafer Cleaning